GB/T 44839-2024: Micro-electromechanical systems(MEMS) technology - Micro-pillar compression test for MEMS materials

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Scope

This document describes a micro-pillar compression testing method designed for the
high-precision and highly repeatable measurement of the compressive properties of
MEMS materials, featuring specimens that are of moderate difficulty to fabricate. The
method measures the uniaxial compressive stress-strain relationship of the specimen to
determine its compressive elastic modulus and yield strength.
The specimen consists of a cylinder fabricated on a rigid (or high-stiffness) substrate
using micromachining techniques. Ideally, its aspect ratio (the ratio of height to
diameter) shall exceed 3.This document applies to the testing of micropillars with
heights of less than 100 μm, prepared from materials such as metals, ceramics, and
polymers.

Basic Data

Standard ID	GB/T 44839-2024 (GB/T44839-2024)
Description (Translated English)	Micro-electromechanical systems(MEMS) technology - Micro-pillar compression test for MEMS materials
Sector / Industry	National Standard (Recommended)
Classification of Chinese Standard	L59
Classification of International Standard	31.080.99
Word Count Estimation	12,169
Date of Issue	2024-10-26
Date of Implementation	2025-02-01
Issuing agency(ies)	State Administration for Market Regulation, China National Standardization Administration