GB/T 38976-2020: Test method for the oxygen concentration in silicon materials - Inert gas fusion infrared detection method

Delivery: 9 seconds. Download (and Email) true-PDF + Invoice.
Get Quotation: Click GB/T 38976-2020 (Self-service in 1-minute)
Newer / historical versions: GB/T 38976-2020

Preview True-PDF

Scope

This Standard specifies the method that uses inert gas melting and infrared
technology to test the oxygen concentration in silicon materials.
This Standard is applicable to the tests of oxygen content in silicon single crystal
and polycrystalline silicon with different conductivity types and different
resistivity ranges. The test range is 2.5×1015cm-3 (0.05ppma) ~ 2.5×1018cm-3
(50ppma).
NOTE: The oxygen content in silicon materials is measured in the number of atoms per
cubic centimeter.

Basic Data

Standard ID	GB/T 38976-2020 (GB/T38976-2020)
Description (Translated English)	Test method for the oxygen concentration in silicon materials - Inert gas fusion infrared detection method
Sector / Industry	National Standard (Recommended)
Classification of Chinese Standard	H17
Classification of International Standard	77.040
Word Count Estimation	6,652
Date of Issue	2020-07-21
Date of Implementation	2021-06-01
Issuing agency(ies)	State Administration for Market Regulation, China National Standardization Administration