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GB/T 38783-2020 English PDF (GBT38783-2020)

GB/T 38783-2020 English PDF (GBT38783-2020)

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GB/T 38783-2020: Method of coating thickness determination for precious metal composites by scanning electron microscope
This standard specifies the measurement method for the coating thickness of various precious metal composites by scanning electron microscope. This standard is applicable to the measurement of coating thickness of 10 nm ~ 200 ??m.
GB/T 38783-2020
GB
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
ICS 77.120.99
H 15
Method of coating thickness determination for
precious metal composites by scanning electron
microscope
ISSUED ON: JUNE 02, 2020
IMPLEMENTED ON: APRIL 01, 2021
Issued by: State Administration for Market Regulation;
Standardization Administration of PRC.
Table of Contents
Foreword ... 3
1 Scope ... 4
2 Normative references ... 4
3 Terms and definitions ... 4
4 Method summary ... 5
5 Equipment ... 5
6 Test method ... 6
7 Processing of test data ... 14
8 Test report ... 14
Method of coating thickness determination for
precious metal composites by scanning electron
microscope
1 Scope
This standard specifies the measurement method for the coating thickness of various precious metal composites by scanning electron microscope.
This standard is applicable to the measurement of coating thickness of 10 nm ~ 200 μm.
2 Normative references
The following documents are essential to the application of this document. For the dated documents, only the versions with the dates indicated are applicable to this document; for the undated documents, only the latest version (including all the amendments) is applicable to this standard.
GB/T 13298-2015 Inspection methods of microstructure for metals
GB/T 16594 General rules for measurement of length in micron scale by
SEM
GB/T 17359 Microbeam analysis - Quantitative analysis using energy
dispersive spectrometry
GB/T 17722-1999 Gold-plated thickness measurement by SEM
GB/T 20307 General rules for nanometer-scale length measurement by
SEM
3 Terms and definitions
The following terms and definitions apply to this document.
3.1
Focused ion beam; FIB
The metal ions (Ga ions) produced by the liquid metal ion source are
accelerated and focused by an ion gun to form an ion beam.
5.2 Ion sputtering apparatus.
5.3 Metallurgical microscope.
5.4 Ultrasonic cleaning machine.
5.5 Metallographic inlay machine.
6 Test method
6.1 Inlay method
6.1.1 Sampling
Cut the portion of precious metal composite profile or device to be tested which has coating. The coating at the sampling position shall be complete and representative.
6.1.2 Preparation before inlay
The removed composite material sample is cleaned by an ultrasonic cleaning machine and dried for use. If the coating thickness is less than 10 μm, the sample surface shall be plated with a 10 μm thick nickel or other metal protective layer. The nickel-plating formula shall be implemented in accordance with the provisions of Appendix A in GB/T 17722-1999.
6.1.3 Inlay
Inlay the composite material samples in accordance with 6.1.3.1 of GB/T 17722-1999.
6.1.4 Grinding and polishing of the sample section
According to Chapter 3 of GB/T 13298-2015, take out the inlaid specimen; grind and polish to meet the requirements of metallographic samples.
6.2 FIB method
6.2.1 Sampling
Perform in accordance with 6.1.1.
6.2.2 Installation of samples
6.2.2.1 Horizontal installation method
Install the sample horizontally on the surface of the flat sample stage, with the coated side of the sample facing up.
according to GB/T 17359. For multi-layer coatings, it is necessary to confirm whether there is a case where the coating is not visible. If the coating is found to be not visible, metallographic etching (inlaid method) or FIB irradiation etching (FIB) can be used to make the coating appear.
6.4 Getting photos
6.4.1 Inlay method
Move the coating to be tested to the center of the field of view. Select a suitable magnification to obtain the secondary electron image or backscattered electron image. The captured image shall have a good contrast effect; the composite interface is obvious; the coating can be measured. Ensure that the thickness of the measured coating is enlarged to more than 5 mm.
6.4.2 FIB method
The horizontal installation method is to shoot when the sample stage is tilted 52°. For the sample of the pre-tilt installation method, the sample stage is first tilted back to 0°; the cross-sectional position is rotated 180° and then tilted 54°, as shown in Figure 7. Move the coating to be tested to the center of the field of view; select the appropriate magnification; obtain the secondary electron image (SE) or backscattered electron image (BSE). The captured image shall have a good contrast effect; the composite interface is obvious; the coating is measurable. Ensure that the thickness of the measured coating is enlarged to more than 5 mm.
a) Horizontal installation method b) Pre-tilt installation method
Figure 7 -- Sample's space state during cross-sectional topography
shooting by FIB method
6.5 Measurement of local coating thickness
Coating
ati
Rot
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sam
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stag
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180
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