GB/T 37416-2019 English PDF (GBT37416-2019)

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GB/T 37416-2019: General specifications of clean-room robot
GB/T 37416-2019
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
ICS 25.040.40
J 28
General specifications of clean-room robot
ISSUED ON: MAY 10, 2019
IMPLEMENTED ON: DECEMBER 01, 2019
Issued by: State Market Regulatory Administration;
Standardization Administration of PRC.
Table of Contents
Foreword ... 3 
1 Scope ... 4 
2 Normative references ... 4 
3 Terms and definitions ... 5 
4 Product categories ... 6 
5 Performance ... 7 
6 Technical requirements ... 7 
6.1 General requirements ... 7 
6.2 Appearance and structure ... 8 
6.3 Features ... 8 
6.4 Pneumatic system ... 8 
6.5 Electrical system ... 8 
6.6 Safety ... 9 
6.7 Noise ... 9 
6.8 Power adaptability ... 10 
6.9 Environmental adaptability ... 10 
7 Test methods ... 10 
7.1 Test conditions ... 10 
7.2 Inspection of appearance and structure ... 11 
7.3 Function inspection ... 11 
7.4 Inspection of pneumatic system ... 11 
7.5 Performance ... 11 
7.6 Safety test ... 12 
7.7 Noise test ... 12 
7.8 Power adaptability test ... 13 
7.9 Environmental adaptability test ... 13 
8 Marking, instruction manual, packaging, transportation and storage ... 13 
8.1 Marking ... 13 
8.2 Instruction manual ... 14 
8.3 Packaging ... 14 
8.4 Transportation ... 14 
8.5 Storage ... 14 
References ... 16 
General specifications of clean-room robot
1 Scope
This standard specifies the product classification, performance, technical
requirements, test methods and signs, instructions for use, packaging,
transportation and storage of clean-room robots.
This standard applies to clean-room robots that are used in clean rooms and
perform tasks such as handling in an atmospheric or vacuum environment.
2 Normative references
The following documents are essential to the application of this document. For
the dated documents, only the versions with the dates indicated are applicable
to this document; for the undated documents, only the latest version (including
all the amendments) are applicable to this standard.
GB/T 191 Packaging - Pictorial marking for handling of goods
GB/T 4768 Mould-proof packaging
GB/T 4857.23 Packaging - Basic tests for transport packages - Part 23:
Random vibration test method
GB/T 4879 Rustproof packaging
GB/T 5048 Moisture-proof packaging
GB 5226.1-2008 Electrical safety of machinery - Electrical equipment of
machines - Part 1: General requirements
GB/T 7932-2017 Pneumatic fluid power - General rules and safety
requirements for systems and their components
GB/T 9969 General principles for preparation of instructions for use of
industrial products
GB 11291.1-2011 Robots for industrial environments - Safety requirements
- Part 1: Robot
GB/T 12642-2013 Industrial robots - Performance criteria and related test
methods
A generic term used to describe a lean gas state below atmospheric
pressure or atmospheric mass density or based on that state environment.
[GB/T 3163-2007, definition 2.3]
3.4
Clean-room robot
Industrial robots (3.1) used in the clean room (3.2) for carrying out tasks
such as handling in the electronics manufacturing, pharmaceutical
manufacturing, food manufacturing industries.
Note: Applicable to atmospheric and vacuum environments.
3.5
Atmospheric robot
A clean-room robot (3.4) that is used in whole or in part in the atmosphere.
3.6
Vacuum robot
A clean-room robot (3.4) that is used in whole or in part in a vacuum (3.3)
environment.
3.7
Cleanliness
The degree of cleanliness distinguished by the number of particles in a unit
volume of air greater than or equal to a certain particle size.
[GB 50073-2013, definition 2.0.12]
3.8
Leak rates
The flow rate of a particular gas through a leak under specified conditions.
[GB/T 3163-2007, definition 6.1.9]
4 Product categories
It is divided as follows by the usage environments:
2008.
6.6 Safety
6.6.1 Basic requirements
The safety of the robot shall comply with the provisions of GB 11291.1-2011.
For clean application features, it shall also meet the following work
requirements:
a) The robot shall not damage the application product during the application
process;
b) The material (silicon wafer, glass substrate, etc.) of the robot during
handling shall not fall or slide;
c) The concentration of airborne particles generated by the robot shall be
controlled and shall not damage the application environment;
d) The robot shall be able to stop in time in the event of a collision.
6.6.2 Grounding
Grounding shall meet the following requirements:
a) The robot shall have an obvious grounding mark;
b) The grounding resistance between the robot’s grounding point and the live
metal part shall be not more than 0.1 Ω.
6.6.3 Insulation resistance
For the robot control device, the insulation between the power AC power supply
circuit and the housing shall be no less than 10 MΩ.
6.6.4 Withstanding voltage
The power AC circuit of the robot and the adjacent non-charged conductor shall
be able to withstand the withstanding voltage test at the AC (50 Hz) voltage
RMS of 1500 V for 1 min. There is no breakdown, flashover, arcing.
6.7 Noise
The noise generated by the robot when operating at rated load and rated speed
shall be not more than 80 dB(A).
7.1.2 The temperature during the test process shall not exceed ±2 °C. The robot
and measuring instrument shall be placed in the test environment for not less
than 8 h to ensure that they are under thermal stability. At the same time, it shall
also prevent the effects of heated air and external heat radiation. The test
environment shall ensure that the test results are not interfered with by
electromagnetic and vibration.
7.1.3 Before the test, the robot needs to be tested for various functions; the
robot is continuously operated for not less than 1 h.
7.1.4 The test of the pose and trajectory characteristics shall be carried out
under load. The center of gravity of the test load during the test shall coincide
with the position of the gravity of the mechanical interface of the robot or the
test point of the tool center point.
7.2 Inspection of appearance and structure
It is carried out according to 5.2 of JB/T 8896-1999.
7.3 Function inspection
It is carried out according to 5.3 of JB/T 8896-1999.
7.4 Inspection of pneumatic system
It is carried out according to Chapter 6 of GB/T 7932-2017.
7.5 Performance
7.5.1 Range of motion of each axis
It is carried out according to the provisions of 5.4.1 of JB/T 8896-1999.
7.5.2 Maximum single axis speed
Under the rated load condition, the joint to be tested is in stable working
condition, the other joints are fixed. Let the joint being tested perform the
maximum range of motion at maximum speed, to measure the maximum speed.
Repeat the measurement 10 times and take the average as the measurement
result.
7.5.3 Pose accuracy and repeatability
It is carried out according to the provisions of 7.2 of GB/T 12642-2013.
Take the maximum value.
7.8 Power adaptability test
Check according to 5.8 of JB/T 8896-1999.
7.9 Environmental adaptability test
7.9.1 Climate and environmental adaptability test
According to the method of 5.10 in JB/T 8896-1999, carry out test under the
working and storage conditions as specified in Table 1.
7.9.2 Mechanical environment adaptability test
It is carried out 8...