GB/T 29658-2013 English PDF (GBT29658-2013)

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GB/T 29658-2013: High-purity sputtering aluminium and aluminium alloy target used in electronic film
GB/T 29658-2013
GB
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
ICS 77.120.10
H 61
High-purity Sputtering Aluminium and Aluminium
Alloy Target Used in Electronic Film
ISSUED ON. SEPTEMBER 6, 2013
IMPLEMENTED ON. MAY 1, 2014
Issued by. General Administration of Quality Supervision, Inspection and
Quarantine of the People's Republic of China;
Standardization Administration of the People's Republic of
China.
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Table of Contents
Foreword ... 3
1 Application Scope ... 4
2 Normative References ... 4
3 Requirements ... 5
4 Test Methods ... 8
5 Inspection Rules ... 9
6 Marking, Packaging, Transportation, Storage and Quality Certification ... 10
7 Ordering (or Contracting) Content ... 12
Foreword
This Standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This Standard shall be under the jurisdiction of National Technical Committee 243 on
Non-ferrous Metals of Standardization Administration of China (SAC/TC 243).
The responsible drafting organization of this Standard. Grikin Advanced Material Co.,
Ltd.
The contributory drafting organizations of this Standard. Konfoong Materials
International Co., Ltd., Xinjiang Joinworld Co., Ltd.
The main drafters of this Standard. Wan Xiaoyong, Luo Junfeng, Liao Zan, Shang
Zaiyan, Yang Hua, Zhu Xiaoguang, Sun Xiulin, He Jinjiang, Xiong Xiaodong, Wang
Xingquan, Wang Xueze, Qian Hongbing, Yu Jie, Liu Jie, Hong Tao, Nu Ligu, Song
Yuping.
High-purity Sputtering Aluminium and Aluminium
Alloy Target Used in Electronic Film
1 Application Scope
This Standard specifies the requirements, test methods, inspection rules and marking,
packaging, transportation and storage and ordering (or contracting) content of high-
purity aluminium and aluminium alloy target used in electronic film.
This Standard applies to all kinds of high-purity aluminium and aluminium alloy
sputtering target materials (hereinafter referred to as aluminium target).
2 Normative References
The following referenced documents are indispensable for the application of this
document. For dated references, only the edition dated applies to this document. For
undated references, the latest edition of the referenced documents (including all
amendments) applies to This Standard.
GB/T 1804, General Tolerances－Tolerances for Linear and Angular Dimensions
without Individual Tolerance Indications
GB/T 6394, Metal – Methods for Estimating the Average Grain Size
GB/T 14265, General Rule of Chemical Analysis for Hydrogen, Oxygen, Nitrogen,
Carbon and Sulfur in Metal’s Materials
GB/T15823, Non-destructive Testing - Test Methods for Helium Leak Testing
GB/T 20975.25, Methods for Chemical Analysis of Aluminium and Aluminium Alloys
– Part 25. Inductively Coupled Plasma Atomic Emission Spectrometric Method
GJB 1580A, Ultrasonic Inspection of Wrought Metal
JB/T 4734, Aluminium Welded Vessels
YS/T 837, Molybdenum Target
YS/T 871, Chemical Analysis of High-purity Aluminium – Determination of Trace
Impurities – Glow Discharge Mass Spectrometry
The internal quality inspection of aluminium target is as specified in GJB1580A.
4.4 Welding quality
4.4.1 Brazing and diffusion welding are as specified in YS/T 837.
4.4.2 The method for helium leak test of electron beam welding is as specified in
GB/T 15823; and water leak test is as specified in JB/T 4734.
4.5 Dimensional inspection method
The dimensions of products and their tolerances shall be measured with measuring
tools of corresponding accuracies.
4.6 Appearance quality inspection method
The appearance quality of aluminium target is evaluated by visual inspection; in case
of any abnormality, use a magnifying glass or digital microscope for identification.
5 Inspection Rules
5.1 Inspection and acceptance
5.1.1 Aluminium target shall be tested by the supplier to ensure the product quality
is as specified in this Standard or the order (or contract); and the quality certificate
shall be filled out.
5.1.2 The purchaser shall conduct retest for the aluminium target received in
accordance with this Standard. If the retest results are inconsistent with this Standard
(or the purchase contract), the purchase shall notify the supplier within 3 months after
receiving the product and it shall be solved as agreed on by the supplier and the
purchaser. If arbitration is required, the samples for arbitration shall be taken in the
presence of both sides.
5.2 Batching
The products shall be submitted for acceptance by batch. Each batch consists of the
products of the same production batch, the same composition and specifications.
5.3 Test items, sampling locations and sampling quantity
5.3.1 Aluminium target shall be tested in an all-round way before delivery. The test
items, sampling locations and sampling quantity shall be as specified in Table 5.
Table 5 – Test Items, Sampling and Quantity of Aluminium Target
Test item Sampling Sampling quantity Article number of requirement
Article number of
test
Chemical End of cast ingot 1 pc/furnace 3.2.2 4.1.1
6.1.1 On the aluminium target which is accepted after inspection, the corporate logo,
composition and production batch number are engraved at the specified location of
products.
6.1.2 Each outer packing is labelled with a paper label, including the content.
a) name and address of the supplier;
b) corporate logo;
c) product name;
d) purity;
e) customer name;
f) order number;
g) material number;
h) production batch number;
i) date of production;
j) other requirements.
6.2 Packaging
6.2.1 The cleaning, drying and inner packing of aluminium target shall be conducted
in a clean room. Target materials shall be washed thoroughly; each piece shall be
packaged separately after vacuum drying; the seal of vacuum bags shall be smooth
without being penetrated; the vacuum bags shall have no leak or vacuum leakage.
6.2.2 The outer packing shall be of paper box or hollow box packing. The packing
boxes shall be provided with anti-collision measures. The quality certificate shall be
packed with a plastic packaging bag before being affixed to a packing box.
6.2.3 The packaging products shall be stored in the clean environment.
6.3 Transportation and storage
During the process of transportation and storage, attention shall be paid to prevention
of vibration, moisture, crushing and secondary pollution.
6.4 Quality certification
Each batch of products shall be accompanied with a quality certificate, indicating.
a) name, address, telephone and fax of the supplier;
b) product name;