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GB/T 25915.2-2021 English PDF (GB/T25915.2-2021)

GB/T 25915.2-2021 English PDF (GB/T25915.2-2021)

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GB/T 25915.2-2021: Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

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Scope

This document specifies minimum requirements for a monitoring plan. This monitoring
plan is for cleanroom or clean zone performance related to air cleanliness by particle
concentration, based upon parameters that measure or affect airborne particle
concentration.
This document applies to the monitoring of particle concentration of particle-size range
0.1 μm ~ 5 μm.
This document does not address condition monitoring of aspects such as vibration or
general maintenance of the engineering systems. Concentrations of ultrafine particles
(particles smaller than 0.1 μm) will be addressed in a separate standard.

Basic Data

Standard ID GB/T 25915.2-2021 (GB/T25915.2-2021)
Description (Translated English) Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard C70
Word Count Estimation 18,186
Issuing agency(ies) State Administration for Market Regulation, China National Standardization Administration


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