GB/T 25915.14-2022: Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration

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Scope

This document applies to the assessment of the suitability of equipment (e.g., machinery,
measuring equipment, process equipment, components and tools) for use in cleanrooms
and associated controlled environments. As specified in GB/T 25915.1, airborne
particle sizes range from 0.1 μm to equal to or larger than 5 μm.
The following items are not covered by this document:
-- assessment of suitability with respect to biocontamination;
-- testing for suitability of decontamination agents and techniques;
-- cleanability of equipment and materials;
-- requirements on design of equipment and selection of materials;
-- physical properties of materials (e.g., electrostatic, thermal properties);
-- optimizing performance of equipment for specific process applications;
-- selection and use of statistical methods for testing;
-- protocols and requirements for local safety regulations.

Basic Data

Standard ID	GB/T 25915.14-2022 (GB/T25915.14-2022)
Description (Translated English)	Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
Sector / Industry	National Standard (Recommended)
Classification of Chinese Standard	C70
Classification of International Standard	13.040.35
Word Count Estimation	22,220
Date of Issue	2022-12-30
Date of Implementation	2023-07-01
Issuing agency(ies)	State Administration for Market Regulation, China National Standardization Administration