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See Chinese contents: GB/T 16596-2019 GB/T 16596-2019: Specification for establishing a wafer coordinate system
This Standard specifies procedures for using rectangular coordinates and polar coordinates to establish the front, back, and three-dimensional wafer coordinate systems. This Standard applies to the establishment of wafer coordinate systems with and without pattern. The coordinate system is used to determine and record the exact locations of test results such as defects and particles on the wafer.
