GB/T 16596-2019: Specification for establishing a wafer coordinate system

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Scope

This Standard specifies procedures for using rectangular coordinates and polar
coordinates to establish the front, back, and three-dimensional wafer coordinate
systems.
This Standard applies to the establishment of wafer coordinate systems with
and without pattern. The coordinate system is used to determine and record the
exact locations of test results such as defects and particles on the wafer.

Basic Data

Standard ID	GB/T 16596-2019 (GB/T16596-2019)
Description (Translated English)	Specification for establishing a wafer coordinate system
Sector / Industry	National Standard (Recommended)
Classification of Chinese Standard	H80
Classification of International Standard	29.045
Word Count Estimation	6,615
Date of Issue	2019-03-25
Date of Implementation	2020-02-01
Issuing agency(ies)	State Administration for Market Regulation, China National Standardization Administration