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GB/T 16595-2019 English PDF (GBT16595-2019)

GB/T 16595-2019 English PDF (GBT16595-2019)

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GB/T 16595-2019: Specification for a universal wafer grid
This Standard specifies grid patterns that can be used to quantitatively describe surface defects on a circular semiconductor wafer. This Standard applies to silicon wafers of which the nominal diameter is 100 mm ~ 200 mm; it also applies to other semiconductor material wafers.

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