GB/T 16595-2019: Specification for a Universal Wafer Grid

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Scope

This Standard specifies grid patterns that can be used to quantitatively describe
surface defects on a circular semiconductor wafer.
This Standard applies to silicon wafers of which the nominal diameter is 100
mm ~ 200 mm; it also applies to other semiconductor material wafers

Basic Data

Standard ID	GB/T 16595-2019 (GB/T16595-2019)
Description (Translated English)	Specification for a Universal Wafer Grid
Sector / Industry	National Standard (Recommended)
Classification of Chinese Standard	H80
Classification of International Standard	29.045
Word Count Estimation	10,135
Date of Issue	2019-03-25
Date of Implementation	2020-02-01
Issuing agency(ies)	State Administration for Market Regulation, China National Standardization Administration