GB 50073-2013 English PDF

GB 50073-2013: Code for design of clean room
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GB 50073-2013
GB
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
UDC
P GB 50073-2013
Code for Design of Clean Room
ISSUED ON. JANUARY 28, 2013
IMPLEMENTED ON. SEPTEMBER 1, 2013
Jointly Issued by. General Administration of Quality Supervision, Inspection
and Quarantine (AQSIQ);
Ministry of Housing and Urban-Rural Development of the
People's Republic of China.
Table of Contents
Foreword ... 3 
1 General ... 6 
2 Terms ... 6 
3 Classification of Air Cleanliness ... 9 
4 Overall Design ... 10 
4.1 Location Selection and General Layout of Clean Room ... 10 
4.2 Process Layout and Design Coordination ... 11 
4.3 Personnel and Material Cleaning ... 11 
4.4 Noise Control ... 13 
4.5 Microvibration Control ... 13 
5 Architecture ... 14 
5.1 General Requirement ... 14 
5.2 Fire Protection and Evacuation ... 15 
5.3 Interior Decoration ... 16 
6 Air Cleaning ... 17 
6.1 General Requirement ... 17 
6.2 Pressure Difference Control of Clean Room ... 18 
6.3 Air Flow Pattern and Air Supply Volume ... 18 
6.4 Air Cleaning Treatment ... 19 
6.5 Heating, Ventilation and Smoke Control ... 20 
6.6 Air Pipe and Accessories ... 20 
7 Water Supply and Drainage ... 21 
7.1 General Requirement ... 21 
7.2 Water Supply ... 22 
7.3 Drainage ... 22 
7.4 Fire Water Supply and Fire-fighting Equipment ... 22 
8 Industrial Pipe ... 23 
8.1 General Requirement ... 23 
8.2 Pipe Material and Valve ... 24 
8.3 Pipe Connection ... 24 
8.4 Safety Technology ... 25 
9 Electricity ... 25 
9.1 Power Distribution ... 25 
9.2 Illumination ... 26 
9.3 Communication ... 27 
9.4 Automatic Control ... 27 
9.5 Electrostatic Protection and Grounding ... 27 
Appendix A Performance Test and Certification of the Clean Room or Clean Zone ... 29 
Appendix B Examples of Fire Hazard Classification for Production Room of Clean Room ... 34 
Appendix C Requirements for Maintenance and Management of Design of Cleaning
Air-conditioning System ... 35 
Explanation of Wording in This Code ... 36 
Code for Design of Clean Room
1 General
1.0.1 This code is formulated with view to making the design of clean room to be
technologically advanced, economic, reliable, safe and qualified as well as comply with
requirements of energy conservation, labor sanitation and environmental protection.
1.0.2 This code is applicable to the design of new-built, extended and rebuilt clean room.
1.0.3 Design of clean room shall the basis of construction installation, maintenance,
examination, test and safe operation.
1.0.4 In addition to this code, the design of clean room shall also comply with requirements
of relevant current standards.
2 Terms
2.0.1 Clean room
The room where the suspended particle concentration in the air is controlled; its
construction and application shall be able to reduce the entering, production and retention of
particles in the room. Other relevant parameters in the room like temperature, humidity and
pressure shall be controlled according to requirements.
2.0.2 Clean zone
Restricted zone where the airborne particle concentration in the air is controlled; its
construction and application shall be able to reduce the entering, production and retention of
particles in the space. Other relevant parameters in the space like temperature, humidity and
pressure shall be controlled according to requirements. Clean zone may be open or closed
type.
2.0.3 Mobile clean booth
Small clean room which may be moved as a whole and may be divided into two types
respectively provided with hoarding made of rigid and flexible materials.
2.0.4 Room for cleaning human body
The room for cleaning human body according to certain procedure before entering into
clean zone.
2.0.5 Room for cleaning material
The room for cleaning material according to certain procedure before entering into clean
zone.
2.0.6 Particle size
The diameter of the globoid which is shown on the adopted particle size tester and
equivalent to the response of the tested particle.
2.0.7 Airborne particle
Solid or liquid airborne particles (with dimension of 0.1~5μm) in the air used for
classification of air cleanliness which are not used to represent the physical property, chemical
property, radioactivity and life feature of airborne particles.
2.0.8 Ultrafine particle
Particles with equivalent diameter less than 0.1μm.
2.0.9 Microparticle
Particles with equivalent diameter greater than 5μm.
2.0.10 Particle size distribution
A function of particle size on its frequency distribution and cumulative distribution.
2.0.11 Particle concentration
The number of airborne particles in the air per unit volume.
2.0.12 Cleanliness
The cleanliness is divided by the number of particles (with particle diameter greater than
or equal to a certain value) in the air per unit volume.
2.0.13 Air flow pattern
The rational design for flow pattern and distribution of interior air.
2.0.14 Unidirectional airflow
The steady and parallel controlled air flow sweeping across the whole section.
2.0.15 Vertical unidirectional airflow
The unidirectional airflow perpendicular to horizontal plane.
2.0.16 Horizontal unidirectional airflow
The unidirectional airflow parallel to horizontal plane.
2.0.17 Non-unidirectional airflow
A distribution pattern of airflow introduced into the clean room (zone) and mixed with
the original air in such room or zone.
2.0.18 Mixed airflow
The airflow composed of unidirectional airflow and non-unidirectional airflow.
2.0.19 Clean working area
The area 0.8~1.5m (except for special process requirements) high from the ground in
clean room.
2.0.20 Air shower
The booth blowing down and removing adhesive particles on the surface of human body
entering clean room by high-speed clean airflow.
2.0.21 Air lock
A buffering room arranged at access of clean room for obstructing polluted airflow from
outdoors or adjacent room and controlling pressure difference.
2.0.22 Pass box
An opening a...
GB 50073-2013
GB
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
UDC
P GB 50073-2013
Code for Design of Clean Room
ISSUED ON. JANUARY 28, 2013
IMPLEMENTED ON. SEPTEMBER 1, 2013
Jointly Issued by. General Administration of Quality Supervision, Inspection
and Quarantine (AQSIQ);
Ministry of Housing and Urban-Rural Development of the
People's Republic of China.
Table of Contents
Foreword ... 3 
1 General ... 6 
2 Terms ... 6 
3 Classification of Air Cleanliness ... 9 
4 Overall Design ... 10 
4.1 Location Selection and General Layout of Clean Room ... 10 
4.2 Process Layout and Design Coordination ... 11 
4.3 Personnel and Material Cleaning ... 11 
4.4 Noise Control ... 13 
4.5 Microvibration Control ... 13 
5 Architecture ... 14 
5.1 General Requirement ... 14 
5.2 Fire Protection and Evacuation ... 15 
5.3 Interior Decoration ... 16 
6 Air Cleaning ... 17 
6.1 General Requirement ... 17 
6.2 Pressure Difference Control of Clean Room ... 18 
6.3 Air Flow Pattern and Air Supply Volume ... 18 
6.4 Air Cleaning Treatment ... 19 
6.5 Heating, Ventilation and Smoke Control ... 20 
6.6 Air Pipe and Accessories ... 20 
7 Water Supply and Drainage ... 21 
7.1 General Requirement ... 21 
7.2 Water Supply ... 22 
7.3 Drainage ... 22 
7.4 Fire Water Supply and Fire-fighting Equipment ... 22 
8 Industrial Pipe ... 23 
8.1 General Requirement ... 23 
8.2 Pipe Material and Valve ... 24 
8.3 Pipe Connection ... 24 
8.4 Safety Technology ... 25 
9 Electricity ... 25 
9.1 Power Distribution ... 25 
9.2 Illumination ... 26 
9.3 Communication ... 27 
9.4 Automatic Control ... 27 
9.5 Electrostatic Protection and Grounding ... 27 
Appendix A Performance Test and Certification of the Clean Room or Clean Zone ... 29 
Appendix B Examples of Fire Hazard Classification for Production Room of Clean Room ... 34 
Appendix C Requirements for Maintenance and Management of Design of Cleaning
Air-conditioning System ... 35 
Explanation of Wording in This Code ... 36 
Code for Design of Clean Room
1 General
1.0.1 This code is formulated with view to making the design of clean room to be
technologically advanced, economic, reliable, safe and qualified as well as comply with
requirements of energy conservation, labor sanitation and environmental protection.
1.0.2 This code is applicable to the design of new-built, extended and rebuilt clean room.
1.0.3 Design of clean room shall the basis of construction installation, maintenance,
examination, test and safe operation.
1.0.4 In addition to this code, the design of clean room shall also comply with requirements
of relevant current standards.
2 Terms
2.0.1 Clean room
The room where the suspended particle concentration in the air is controlled; its
construction and application shall be able to reduce the entering, production and retention of
particles in the room. Other relevant parameters in the room like temperature, humidity and
pressure shall be controlled according to requirements.
2.0.2 Clean zone
Restricted zone where the airborne particle concentration in the air is controlled; its
construction and application shall be able to reduce the entering, production and retention of
particles in the space. Other relevant parameters in the space like temperature, humidity and
pressure shall be controlled according to requirements. Clean zone may be open or closed
type.
2.0.3 Mobile clean booth
Small clean room which may be moved as a whole and may be divided into two types
respectively provided with hoarding made of rigid and flexible materials.
2.0.4 Room for cleaning human body
The room for cleaning human body according to certain procedure before entering into
clean zone.
2.0.5 Room for cleaning material
The room for cleaning material according to certain procedure before entering into clean
zone.
2.0.6 Particle size
The diameter of the globoid which is shown on the adopted particle size tester and
equivalent to the response of the tested particle.
2.0.7 Airborne particle
Solid or liquid airborne particles (with dimension of 0.1~5μm) in the air used for
classification of air cleanliness which are not used to represent the physical property, chemical
property, radioactivity and life feature of airborne particles.
2.0.8 Ultrafine particle
Particles with equivalent diameter less than 0.1μm.
2.0.9 Microparticle
Particles with equivalent diameter greater than 5μm.
2.0.10 Particle size distribution
A function of particle size on its frequency distribution and cumulative distribution.
2.0.11 Particle concentration
The number of airborne particles in the air per unit volume.
2.0.12 Cleanliness
The cleanliness is divided by the number of particles (with particle diameter greater than
or equal to a certain value) in the air per unit volume.
2.0.13 Air flow pattern
The rational design for flow pattern and distribution of interior air.
2.0.14 Unidirectional airflow
The steady and parallel controlled air flow sweeping across the whole section.
2.0.15 Vertical unidirectional airflow
The unidirectional airflow perpendicular to horizontal plane.
2.0.16 Horizontal unidirectional airflow
The unidirectional airflow parallel to horizontal plane.
2.0.17 Non-unidirectional airflow
A distribution pattern of airflow introduced into the clean room (zone) and mixed with
the original air in such room or zone.
2.0.18 Mixed airflow
The airflow composed of unidirectional airflow and non-unidirectional airflow.
2.0.19 Clean working area
The area 0.8~1.5m (except for special process requirements) high from the ground in
clean room.
2.0.20 Air shower
The booth blowing down and removing adhesive particles on the surface of human body
entering clean room by high-speed clean airflow.
2.0.21 Air lock
A buffering room arranged at access of clean room for obstructing polluted airflow from
outdoors or adjacent room and controlling pressure difference.
2.0.22 Pass box
An opening a...