GB/T 20726-2015: Microbeam analysis -- Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis

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Scope

This Standard defines the most important quantities that characterize an
energy-dispersive X-ray spectrometer consisting of a semiconductor detector,
a pre-amplifier and a signal-processing unit as the essential parts. This
Standard is only applicable to spectrometers with semiconductor detectors
operating on the principle of solid-state ionization. This Standard specifies
minimum requirements and how relevant instrumental performance parameters
are to be checked for such spectrometers attached to a scanning electron
microscope (SEM) or an electron probe microanalyser (EPMA). The procedure
used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and
is outside the scope of this Standard.

Basic Data

Standard ID	GB/T 20726-2015 (GB/T20726-2015)
Description (Translated English)	Microbeam analysis -- Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis
Sector / Industry	National Standard (Recommended)
Classification of Chinese Standard	G40
Classification of International Standard	71.040.99
Word Count Estimation	15,171
Date of Issue	2015-10-09
Date of Implementation	2016-09-01
Older Standard (superseded by this standard)	GB/T 20726-2006
Quoted Standard	GB/T 21636-2008
Adopted Standard	ISO 15632-2012, IDT
Regulation (derived from)	National Standard Announcement 2015 No.31
Issuing agency(ies)	General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary	This standard specifies the characterization of semiconductor detectors, preamplifiers and signal processing systems for the basic configuration of the X-ray energy dispersive spectroscopy (EDS) characteristics of the most important performance parameters. This standard only applies to solid-state semiconductor detectors of ionizing principle spectrometer. This standard specifies the scanning electron microscope (SEM) or electron probe microanalysis (EPMA) minimum requirements associated with EDS performance parameters and verification methods. As for the actual analysis process, ISO 22309 and ASTM E1508 specification already, not within the scope of this standard.